Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves

1. Iacopi, F.
2. Travaly, Y.
3. Van Hove, M.
4. Jonas, A.M.
5. Molina-Aldareguia, J.M.
6. Elizalde, M.R.
7. Ocaña, I.