Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves

  1. Iacopi, F.
  2. Travaly, Y.
  3. Van Hove, M.
  4. Jonas, A.M.
  5. Molina-Aldareguia, J.M.
  6. Elizalde, M.R.
  7. Ocaña, I.
Revue:
Journal of Materials Research

ISSN: 0884-2914

Année de publication: 2006

Volumen: 21

Número: 12

Pages: 3161-3167

Type: Article

DOI: 10.1557/JMR.2006.0386 GOOGLE SCHOLAR