X-ray diffraction imaging of dislocation generation related to microcracks in Si wafers
- Wittge, J.
- Danilewsky, A.
- Allen, D.
- McNally, P.
- Li, Z.J.
- Baumbach, T.
- Gorostegui-Colinas, E.
- Garagorri, J.
- Elizalde, M.R.
- Jacques, D.
- Fossati, M.C.
- Bowen, D.K.
- Tanner, B.K.
ISSN: 0885-7156, 1945-7413
Year of publication: 2010
Volume: 25
Issue: 2
Pages: 99-103
Type: Article