Adhesion studies in low-k interconnects using cross sectional nanoindentation

1. Molina-Aldareguia, J.M.
2. Ocaña, I.
3. Gonzalez, D.
4. Elizalde, M.R.
5. Sánchez, J.M.
6. Martínez-Esnaola, J.M.
7. Sevillano, J.G.
8. Scherban, T.
9. Pantuso, D.
10. Sun, B.
11. Xu, G.
12. Miner, B.
13. He, J.
14. Maiz, J.