End-fire coupling of a SU-8 waveguide to a silicon mesa photodiode: Integrability in an optical analysis microsystem

  1. De La Fuente, P.
  2. Etxeberria, J.A.
  3. Berganzo, J.
  4. Ruano-López, J.M.
  5. Arroyo, M.T.
  6. Castaño, E.
  7. Gracia, F.J.
Journal:
Sensors and Actuators, A: Physical

ISSN: 0924-4247

Year of publication: 2005

Volume: 123-124

Pages: 313-318

Type: Conference paper

DOI: 10.1016/J.SNA.2005.02.013 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus