LASER INTERFERENCE LITHOGRAPHY
- Tan, C.
- Peng, C. S.
- Rodriguez, Ainara
- Pessa, M.
- Olaizola, S. M.
- Petryakov, V. N.
- Verevkin, Yu K.
- Zhang, J.
- Wang, Z.
- Berthou, T.
- Tisserand, S.
Book Series:
ADVANCES IN NANOTECHNOLOGY, VOLUME 4
- Bartul, Z (coord.)
- Trenor, J (coord.)
ISBN: 978-1-61668-618-5
Year of publication: 2010
Volume: 4
Pages: 179-203
Type: Book chapter