Use of nanoindentation to characterise the plasma damage region in low-k dielectric films

  1. Molina-Aldareguia, J.M.
  2. Elizalde, M.R.
  3. Ocaña, I.
  4. Gil-Sevillano, J.
  5. Martínez-Esnaola, J.M.
  6. Iacopi, F.
  7. Travaly, Y.
  8. Van Hove, M.
Proceedings:
American Society of Mechanical Engineers, Applied Mechanics Division, AMD

ISSN: 0160-8835

ISBN: 9780791837900

Year of publication: 2006

Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Applied Mechanics Division

Type: Conference paper

DOI: 10.1115/IMECE2006-15835 GOOGLE SCHOLAR
Data source: Scopus