Reyes
Elizalde González
Investigadora Principal
Université Catholique de Louvain
Louvain-la-Neuve, BélgicaUniversité Catholique de Louvain-ko ikertzaileekin lankidetzan egindako argitalpenak (1)
2006
-
Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves
Journal of Materials Research, Vol. 21, Núm. 12, pp. 3161-3167