Reyes
Elizalde González
Investigadora Principal
European Synchrotron Radiation Facility
Grenoble, FranciaPublikationen in Zusammenarbeit mit Forschern von European Synchrotron Radiation Facility (1)
2011
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Real-time X-ray diffraction imaging for semiconductor wafer metrology and high temperature in situ experiments
Physica Status Solidi (A) Applications and Materials Science, Vol. 208, Núm. 11, pp. 2499-2504