Noemí
Pérez Hernández
Profesora Titular
![Foto de M.](/img/nophoto.png)
M.
Ritala
Publikationen, an denen er mitarbeitet M. Ritala (1)
2004
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Work function stability of thermal ALD Ta(Si)N gate electrodes on HfO 2
ESSCIRC 2004 - Proceedings of the 34th European Solid-State Device Research Conference