Work function stability of thermal ALD Ta(Si)N gate electrodes on HfO 2
- Hooker, J.C.
- Perez, N.
- Alen, P.
- Ritala, M.
- Leskelä, M.
- Roozeboom, F.
- Van Berkum, J.G.M.
- Naburgh, E.P.
- Van Den Heuvel, F.C.
- Maes, J.W.
Aktak:
ESSCIRC 2004 - Proceedings of the 34th European Solid-State Device Research Conference
ISBN: 9780780384781
Argitalpen urtea: 2004
Orrialdeak: 85-88
Mota: Biltzar ekarpena