Simulation of cross-sectional nanoindentation in interconnect structures with cohesive elements

  1. Gonzalez, D.
  2. Molina, J.
  3. Ocana, I.
  4. Elizalde, M.R.
  5. Sanchez, J.M.
  6. Martinez-Esnaola, J.M.
  7. Gil-Sevillano, J.
  8. Xu, G.
  9. Pantuso, D.
  10. Scherban, T.
  11. Sun, B.
  12. Miner, B.
  13. He, J.
  14. Maiz, J.
Actas:
Fracture of Nano and Engineering Materials and Structures - Proceedings of the 16th European Conference of Fracture

ISBN: 9781402049712

Año de publicación: 2006

Páginas: 685-686

Tipo: Aportación congreso

DOI: 10.1007/1-4020-4972-2_339 GOOGLE SCHOLAR