Simulation of cross-sectional nanoindentation in interconnect structures with cohesive elements

1. Gonzalez, D.
2. Molina, J.
3. Ocana, I.
4. Elizalde, M.R.
5. Sanchez, J.M.
6. Martinez-Esnaola, J.M.
7. Gil-Sevillano, J.
8. Xu, G.
9. Pantuso, D.
10. Scherban, T.
11. Sun, B.
12. Miner, B.
13. He, J.
14. Maiz, J.