Laser interference lithography

  1. Tan, C.
  2. Peng, C.S.
  3. Rodriguez, A.
  4. Pessa, M.
  5. Olaizola, S.M.
  6. Petryakov, V.N.
  7. Verevkin, Y.K.
  8. Zhang, J.
  9. Wang, Z.
  10. Berthou, T.
  11. Tisserand, S.
Book:
Advances in Nanotechnology. Volume 4

ISBN: 9781616686185

Year of publication: 2010

Pages: 179-204

Type: Book chapter