Metallization and electrical characterization of platinum thin film microelectrodes on biocompatible polydimethylsiloxane substrates for neural implants

  1. Fuentes, M.D.C.
  2. Pérez, N.
  3. Ayerdi, I.
Revue:
Thin Solid Films

ISSN: 0040-6090

Année de publication: 2017

Volumen: 636

Pages: 438-445

Type: Article

DOI: 10.1016/J.TSF.2017.06.017 GOOGLE SCHOLAR