SU8 protective layers in liquid operating SAWs
- Arana, N.
- Puente, D.
- Ayerdi, I.
- Castaño, E.
- Berganzo, J.
ISSN: 0925-4005
Year of publication: 2006
Volume: 118
Issue: 1-2
Pages: 374-379
Type: Article
ISSN: 0925-4005
Year of publication: 2006
Volume: 118
Issue: 1-2
Pages: 374-379
Type: Article