SU8 protective layers in liquid operating SAWs

  1. Arana, N.
  2. Puente, D.
  3. Ayerdi, I.
  4. Castaño, E.
  5. Berganzo, J.
Journal:
Sensors and Actuators, B: Chemical

ISSN: 0925-4005

Year of publication: 2006

Volume: 118

Issue: 1-2

Pages: 374-379

Type: Article

DOI: 10.1016/J.SNB.2006.04.083 GOOGLE SCHOLAR