Real-time X-ray diffraction imaging for semiconductor wafer metrology and high temperature in situ experiments
- Danilewsky, A.N.
- Wittge, J.
- Hess, A.
- Cröll, A.
- Rack, A.
- Allen, D.
- McNally, P.
- Dos Santos Rolo, T.
- Vagovič, P.
- Baumbach, T.
- Garagorri, J.
- Elizalde, M.R.
- Tanner, B.K.
ISSN: 1862-6300, 1862-6319
Year of publication: 2011
Volume: 208
Issue: 11
Pages: 2499-2504
Type: Article