Characterization of interconnect interfacial adhesion by cross-sectional nanoindentation

  1. Scherban, T.
  2. Pantuso, D.
  3. Sun, B.
  4. El-Mansy, S.
  5. Xu, J.
  6. Elizalde, M.R.
  7. Sánchez, J.M.
  8. Martínez-Esnaola, J.M.
Journal:
International Journal of Fracture

ISSN: 0376-9429

Year of publication: 2003

Volume: 120

Issue: 1-2

Pages: 421-429

Type: Article

DOI: 10.1023/A:1024931913643 GOOGLE SCHOLAR
Data source: Scopus