Thin film technology applied to the development of a multilayer pressure sensor device

  1. García-Alonso, A.
  2. Castaño, E.
  3. Obieta, I.
  4. Garcia, J.
  5. Gracia, F.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1994

Volume: 45

Issue: 10-11

Pages: 1103-1105

Type: Article

DOI: 10.1016/0042-207X(94)90035-3 GOOGLE SCHOLAR
Data source: Scopus