WIN
Wireless INstruments
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Philips Research Eindhoven
Amsterda, HolandaPublicaciones en colaboración con investigadores/as de Philips Research Eindhoven (2)
2004
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Ru and RuO2 gate electrodes for advanced CMOS technology
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
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Work function stability of thermal ALD Ta(Si)N gate electrodes on HfO 2
ESSCIRC 2004 - Proceedings of the 34th European Solid-State Device Research Conference