José Manuel
Martínez Esnaola
Investigador Principal Senior
Interuniversity Microelectronics Centre
Lovaina, BélgicaPublications en collaboration avec des chercheurs de Interuniversity Microelectronics Centre (1)
2006
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Use of nanoindentation to characterise the plasma damage region in low-k dielectric films
American Society of Mechanical Engineers, Applied Mechanics Division, AMD