Reyes
Elizalde González
Investigadora Principal
![Foto de Reyes](/img/nophoto.png)
![Foto de Interuniversity Microelectronics Centre](/img/noimage_org.png)
Interuniversity Microelectronics Centre
Lovaina, BélgicaPublicaciones en colaboración con investigadores/as de Interuniversity Microelectronics Centre (2)
2006
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Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves
Journal of Materials Research, Vol. 21, Núm. 12, pp. 3161-3167
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Use of nanoindentation to characterise the plasma damage region in low-k dielectric films
American Society of Mechanical Engineers, Applied Mechanics Division, AMD