Isabel
Ayerdi Olaizola
Investigadora Senior
Sergio
Arana Alonso
Investigador Senior
Publicaciones en las que colabora con Sergio Arana Alonso (1)
2006
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Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer
IEEE Sensors Journal, Vol. 6, Núm. 3, pp. 548-556