Thermal behavior of freestanding microstructures fabricated by silicon frontside processing using porous silicon as sacrificial layer

  1. Puente, D.
  2. Arana, S.
  3. Gracia, J.
  4. Ayerdi, I.
Journal:
IEEE Sensors Journal

ISSN: 1530-437X

Year of publication: 2006

Volume: 6

Issue: 3

Pages: 548-556

Type: Article

DOI: 10.1109/JSEN.2006.874030 GOOGLE SCHOLAR
Data source: Scopus