Isabel
Ayerdi Olaizola
Investigadora Senior
Institute of Applied Physics
Nizhniy Novgorod, RusiaPublicaciones en colaboración con investigadores/as de Institute of Applied Physics (2)
2009
-
High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation
Applied Surface Science, Vol. 255, Núm. 10, pp. 5537-5541
-
Laser interference lithography for nanoscale structuring of materials: From laboratory to industry
Microelectronic Engineering, Vol. 86, Núm. 4-6, pp. 937-940