Noemí
Pérez Hernández
Profesora Titular
F.
Roozeboom
Publicaciones en las que colabora con F. Roozeboom (2)
2004
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Ru and RuO2 gate electrodes for advanced CMOS technology
Materials Science and Engineering B: Solid-State Materials for Advanced Technology
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Work function stability of thermal ALD Ta(Si)N gate electrodes on HfO 2
ESSCIRC 2004 - Proceedings of the 34th European Solid-State Device Research Conference