Asociación Centro Tecnológico Ceit (CEIT)
Centro / Instituto vinculado a la Universidad de Navarra
![Foto de Asociación Centro Tecnológico Ceit (CEIT)](/img/uploaded/3A41B8922D84AAD3AAD67B4D4829B985.jpg)
![Foto de Interuniversity Microelectronics Centre](/img/noimage_org.png)
Interuniversity Microelectronics Centre
Lovaina, BélgicaPublicacions en col·laboració amb investigadors/es de Interuniversity Microelectronics Centre (2)
2006
-
Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves
Journal of Materials Research, Vol. 21, Núm. 12, pp. 3161-3167
-
Use of nanoindentation to characterise the plasma damage region in low-k dielectric films
American Society of Mechanical Engineers, Applied Mechanics Division, AMD