Publikationen in Zusammenarbeit mit Forschern von Institute of Applied Physics (2)

2009

  1. High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation

    Applied Surface Science, Vol. 255, Núm. 10, pp. 5537-5541

  2. Laser interference lithography for nanoscale structuring of materials: From laboratory to industry

    Microelectronic Engineering, Vol. 86, Núm. 4-6, pp. 937-940