(TECNUN) Ingeniería Eléctrica y Electrónica
Departamento académico
National Centre of Scientific Research Demokritos
Atenas, GreciaPublications in collaboration with researchers from National Centre of Scientific Research Demokritos (1)
2004
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Ru and RuO2 gate electrodes for advanced CMOS technology
Materials Science and Engineering B: Solid-State Materials for Advanced Technology