Fabricación de microrrobots: MEMSLAB de la Universidad de Extremadura

  1. Paloma Rodríguez 1
  2. Enrique Mancha-Sánchez 1
  3. Almudena Bravo 1
  4. Cristina Nuevo-Gallardo 1
  5. Inés Tejado 1
  6. Blas Vinagre 1
  1. 1 Universidad Extremadura
Buch:
XLII Jornadas de Automática: libro de actas, Castellón, 1 a 3 de septiembre de 2021

Verlag: Universitat Jaume I ; Servizo de Publicacións ; Universidade da Coruña ; Comité Español de Automática

ISBN: 978-84-9749-804-3

Datum der Publikation: 2021

Seiten: 160-167

Kongress: Jornadas de Automática (42. 2021. Castellón)

Art: Konferenz-Beitrag

Zusammenfassung

Microrobotics is an emerging field of research with countless applications in industry, biology and medicine. Despite advances in the field, there are still considerable challenges including that of micrometer-scale robot manufacturing. The fabrication of microrobots benefits from advances in microelectromechanical systems (MEMS) manufacturing. This paper presents the equipment that forms the MEMS fabrication laboratory at Universidad de Extremadura (UEX), as well as examples of microrobot fabrication that have been carried out.