Fabricación de microrrobots: MEMSLAB de la Universidad de Extremadura
- Paloma Rodríguez 1
- Enrique Mancha-Sánchez 1
- Almudena Bravo 1
- Cristina Nuevo-Gallardo 1
- Inés Tejado 1
- Blas Vinagre 1
- 1 Universidad Extremadura
Editorial: Universitat Jaume I ; Servizo de Publicacións ; Universidade da Coruña ; Comité Español de Automática
ISBN: 978-84-9749-804-3
Ano de publicación: 2021
Páxinas: 160-167
Congreso: Jornadas de Automática (42. 2021. Castellón)
Tipo: Achega congreso
Resumo
Microrobotics is an emerging field of research with countless applications in industry, biology and medicine. Despite advances in the field, there are still considerable challenges including that of micrometer-scale robot manufacturing. The fabrication of microrobots benefits from advances in microelectromechanical systems (MEMS) manufacturing. This paper presents the equipment that forms the MEMS fabrication laboratory at Universidad de Extremadura (UEX), as well as examples of microrobot fabrication that have been carried out.