Fabricación de microrrobots: MEMSLAB de la Universidad de Extremadura

  1. Paloma Rodríguez 1
  2. Enrique Mancha-Sánchez 1
  3. Almudena Bravo 1
  4. Cristina Nuevo-Gallardo 1
  5. Inés Tejado 1
  6. Blas Vinagre 1
  1. 1 Universidad Extremadura
Liburua:
XLII Jornadas de Automática: libro de actas, Castellón, 1 a 3 de septiembre de 2021

Argitaletxea: Universitat Jaume I ; Servizo de Publicacións ; Universidade da Coruña ; Comité Español de Automática

ISBN: 978-84-9749-804-3

Argitalpen urtea: 2021

Orrialdeak: 160-167

Biltzarra: Jornadas de Automática (42. 2021. Castellón)

Mota: Biltzar ekarpena

Laburpena

Microrobotics is an emerging field of research with countless applications in industry, biology and medicine. Despite advances in the field, there are still considerable challenges including that of micrometer-scale robot manufacturing. The fabrication of microrobots benefits from advances in microelectromechanical systems (MEMS) manufacturing. This paper presents the equipment that forms the MEMS fabrication laboratory at Universidad de Extremadura (UEX), as well as examples of microrobot fabrication that have been carried out.