Enhanced depth control of ultrafast laser micromachining of microchannels in soda-lime glass
- Rodríguez, A.
- Arriola, A.
- Tavera, T.
- Pérez, N.
- Olaizola, S.M.
Journal:
Microelectronic Engineering
ISSN: 0167-9317
Year of publication: 2012
Volume: 98
Pages: 672-675
Type: Conference paper