A design tool for pressure microsensors based on FEM simulations

  1. Bistué, G.
  2. Elizalde, J.G.
  3. García-Alonso, S.
  4. Castaño, E.
  5. Gracia, F.J.
  6. García-Alonso, A.
Journal:
Sensors and Actuators, A: Physical

ISSN: 0924-4247

Year of publication: 1997

Volume: 62

Issue: 1-3

Pages: 591-594

Type: Article

DOI: 10.1016/S0924-4247(97)01598-7 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus