Two-dimensional periodic nanoscale patterning of solid surfaces by four-beam standing wave excimer laser lithography
- Verevkin, Y.K.
- Daume, E.Y.
- Petryakov, V.N.
- Klimov, A.Y.
- Gribkov, B.S.
- Filatov, D.O.
- Gushchina, Y.Y.
- Tan, C.
- Peng, C.S.
- Pessa, M.
- Wang, Z.
- Olaizola, S.M.
- Tisserand, S.
Livre:
Laser Beams: Theory, Properties and Applications
ISBN: 9781608762668
Année de publication: 2011
Pages: 159-204
Type: Chapitre d'ouvrage