Two-dimensional periodic nanoscale patterning of solid surfaces by four-beam standing wave excimer laser lithography

1. Verevkin, Y.K.
2. Daume, E.Y.
3. Petryakov, V.N.
4. Klimov, A.Y.
5. Gribkov, B.S.
6. Filatov, D.O.
7. Gushchina, Y.Y.
8. Tan, C.
9. Peng, C.S.
10. Pessa, M.
11. Wang, Z.
12. Olaizola, S.M.
13. Tisserand, S.