Ceramic pressure sensor based on tantalum thin film
- Ayerdi, I.
- Castaño, E.
- Garcia-Alonso, A.
- Gracia, F.J.
ISSN: 0924-4247
Année de publication: 1994
Volumen: 42
Número: 1-3
Pages: 435-438
Type: Article
Revue:
Sensors and Actuators: A. Physical