Communication integrated circuits
University of Tampere
Tampere, FinlandiaPublicacións en colaboración con investigadores/as de University of Tampere (3)
2009
-
High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation
Applied Surface Science, Vol. 255, Núm. 10, pp. 5537-5541
-
Interference lithography processes with high-power laser pulses
Proceedings of SPIE - The International Society for Optical Engineering
-
Laser interference lithography for nanoscale structuring of materials: From laboratory to industry
Microelectronic Engineering, Vol. 86, Núm. 4-6, pp. 937-940