2006

1. Extent of plasma damage to porous organosilicate films characterized with nanoindentation, x-ray reflectivity, and surface acoustic waves

   Journal of Materials Research, Vol. 21, Núm. 12, pp. 3161-3167

2. Use of nanoindentation to characterise the plasma damage region in low-k dielectric films

   American Society of Mechanical Engineers, Applied Mechanics Division, AMD

3. Use of nanoindentation to characterise the plasma damage region in low-k dielectric films

   American Society of Mechanical Engineers, Applied Mechanics Division, AMD