(TECNUN) Ingeniería Eléctrica y Electrónica
Departamento académico
University of Tampere
Tampere, FinlandiaPublicaciones en colaboración con investigadores/as de University of Tampere (3)
2009
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High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation
Applied Surface Science, Vol. 255, Núm. 10, pp. 5537-5541
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Interference lithography processes with high-power laser pulses
Proceedings of SPIE - The International Society for Optical Engineering
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Laser interference lithography for nanoscale structuring of materials: From laboratory to industry
Microelectronic Engineering, Vol. 86, Núm. 4-6, pp. 937-940