Porous silicon for the development of capacitive microstructures
- Sancho, A.
- Arizti, F.
- Gracia, F.J.
ISSN: 0167-9317
Year of publication: 2009
Volume: 86
Issue: 11
Pages: 2144-2148
Type: Article
ISSN: 0167-9317
Year of publication: 2009
Volume: 86
Issue: 11
Pages: 2144-2148
Type: Article