3D macroporous structures for the development of high capacitance silicon integrated microcapacitors

  1. Sancho, A.
  2. Etxeberria, J.A.
  3. Gracia, F.J.
Journal:
Microelectronic Engineering

ISSN: 0167-9317

Year of publication: 2007

Volume: 84

Issue: 5-8

Pages: 1308-1311

Type: Article

DOI: 10.1016/J.MEE.2007.01.233 GOOGLE SCHOLAR
Data source: Scopus