Hardness of C, CNx and AlN thin films after rapid thermal annealing

  1. Beshkov, G.
  2. Vassilev, G.P.
  3. Elizalde, M.R.
  4. Gomez-Acebo, T.
Journal:
Materials Chemistry and Physics

ISSN: 0254-0584

Year of publication: 2003

Volume: 82

Issue: 2

Pages: 452-457

Type: Article

DOI: 10.1016/S0254-0584(03)00280-3 GOOGLE SCHOLAR
Data source: Scopus