Dislocation sources and slip band nucleation from indents on silicon wafers

  1. Wittge, J.
  2. Danilewsky, A.N.
  3. Allen, D.
  4. McNally, P.
  5. Li, Z.
  6. Baumbach, T.
  7. Gorostegui-Colinas, E.
  8. Garagorri, J.
  9. Elizalde, M.R.
  10. Jacques, D.
  11. Fossati, M.C.
  12. Bowen, D.K.
  13. Tanner, B.K.
Journal:
Journal of Applied Crystallography

ISSN: 0021-8898 1600-5767

Year of publication: 2010

Volume: 43

Issue: 5 PART 1

Pages: 1036-1039

Type: Article

DOI: 10.1107/S0021889810029894 GOOGLE SCHOLAR