Selective formation of porous silicon using silicon nitride and SU-8 masks for electroluminescence applications
- Celigüeta, I.
- Arana, S.
- Gracia, F.J.
- Castaño, E.
Proceedings:
2005 Spanish Conference on Electron Devices, Proceedings
ISBN: 9780780388109
Year of publication: 2005
Volume: 2005
Pages: 331-334
Type: Conference paper