Selective formation of porous silicon using silicon nitride and SU-8 masks for electroluminescence applications
- Celigüeta, I.
- Arana, S.
- Gracia, F.J.
- Castaño, E.
Aktak:
2005 Spanish Conference on Electron Devices, Proceedings
ISBN: 9780780388109
Argitalpen urtea: 2005
Alea: 2005
Orrialdeak: 331-334
Mota: Biltzar ekarpena