Selective formation of porous silicon using silicon nitride and SU-8 masks for electroluminescence applications

  1. Celigüeta, I.
  2. Arana, S.
  3. Gracia, F.J.
  4. Castaño, E.
Actes de conférence:
2005 Spanish Conference on Electron Devices, Proceedings

ISBN: 9780780388109

Année de publication: 2005

Volumen: 2005

Pages: 331-334

Type: Communication dans un congrès

DOI: 10.1109/SCED.2005.1504395 GOOGLE SCHOLAR