Formation of 4-beam laser interference patterns for nanolithography

  1. Zhang, J.
  2. Wang, Z.
  3. Verevkin, Y.K.
  4. Olaizola, S.M.
  5. Peng, C.
  6. Tan, C.
  7. Rodriguez, A.
  8. Daume, E.Y.
  9. Berthou, T.
  10. Tisserand, S.
  11. Ji, Z.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819467218

Year of publication: 2007

Volume: 6593

Type: Conference paper

DOI: 10.1117/12.723782 GOOGLE SCHOLAR
Data source: Scopus