Formation of 4-beam laser interference patterns for nanolithography

  1. Zhang, J.
  2. Wang, Z.
  3. Verevkin, Y.K.
  4. Olaizola, S.M.
  5. Peng, C.
  6. Tan, C.
  7. Rodriguez, A.
  8. Daume, E.Y.
  9. Berthou, T.
  10. Tisserand, S.
  11. Ji, Z.
Aktak:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819467218

Argitalpen urtea: 2007

Alea: 6593

Mota: Biltzar ekarpena

DOI: 10.1117/12.723782 GOOGLE SCHOLAR
Datuen iturria: Scopus