Formation of 4-beam laser interference patterns for nanolithography

  1. Zhang, J.
  2. Wang, Z.
  3. Verevkin, Y.K.
  4. Olaizola, S.M.
  5. Peng, C.
  6. Tan, C.
  7. Rodriguez, A.
  8. Daume, E.Y.
  9. Berthou, T.
  10. Tisserand, S.
  11. Ji, Z.
Actas:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819467218

Ano de publicación: 2007

Volume: 6593

Tipo: Achega congreso

DOI: 10.1117/12.723782 GOOGLE SCHOLAR
Fonte de datos: Scopus