Current developments and applications using multi-beam laser interference lithography for nanoscale structuring of materials

  1. Su, S.Z.
  2. Rodríguez, A.
  3. Olaizola, S.M.
  4. Peng, C.S.
  5. Tan, C.
  6. Verevkin, Y.K.
  7. Berthoud, T.
  8. Tisserand, S.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

ISBN: 9780819467218

Year of publication: 2007

Volume: 6593

Type: Conference paper

DOI: 10.1117/12.723620 GOOGLE SCHOLAR
Data source: Scopus